a2dae] ~D.o.w.n.l.o.a.d@ Effects of Ultra-Thin Germanium Layers at the Silicon-Oxide Interface During Oxidation Reactions on Injection of Interstitials - Thomas Martin Jr %e.P.u.b% Online

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Abstract:It is well known that the oxidation of Silicon will inject interstitial atoms into the bulk, causing various effects such as OED and OSF. The presence of Germanium at this oxidizing interface has long been known to suppress this interstitial injection. Previously it was believed that only the top monolayer at the oxidizing interface was responsible for this effect

Title : Effects of Ultra-Thin Germanium Layers at the Silicon-Oxide Interface During Oxidation Reactions on Injection of Interstitials
Author : Thomas Martin Jr
Language : en
Rating :
4.90 out of 5 stars
Type : PDF, ePub, Kindle
Uploaded : Apr 15, 2021
Book code : a2dae

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